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Development of a standalone zoneplate based EUV mask defect review tool

2022

Perera, Chami;
Yoon, Gi Sung;
Carlson, Ryan;
Yang, Baorui;
Hermes, Mike;
Houser, Dave;
Khodarev, Alexander;
Murray, Chuck;
Grodt, Travis;
Allézy, Arnaud;
Chao, Weilun;
Salmassi, Farhad;
Gullikson, Eric;
Naulleau, Patrick
Editor(s): Lio, Anna;
Burkhardt, Martin
et al.

Published Web Location

https://doi.org/10.1117/12.2617277

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- Kowalski, M;
- Kozynets, T;
- Kruiswijk, K;
- Krupczak, E;
- Kumar, A;
- Kun, E;
- Kurahashi, N;
- Lad, N;
- Gualda, C Lagunas;
- Lamoureux, M;
- Larson, MJ;
- Lauber, F;
- Lazar, JP;
- Lee, JW;
- DeHolton, K Leonard;
- Leszczyńska, A;
- Lincetto, M;
- Liu, QR;
- Liubarska, M;
- Lohfink, E;
- Love, C;
- Mariscal, CJ Lozano;
- Lu, L;
- Lucarelli, F;
- Ludwig, A;
- Luszczak, W;
- Lyu, Y;
- Madsen, J;
- Mahn, KBM;
- Makino, Y;
- Mancina, S;
- Sainte, W Marie;
- Mariş, IC;
- Marka, S;
- Marka, Z;
- Marsee, M;
- Martinez-Soler, I;
- Maruyama, R;
- Mayhew, F;
- McElroy, T;
- McNally, F;
- Mead, JV;
- Meagher, K;
- Mechbal, S;
- Medina, A;
- Meier, M;
- Meighen-Berger, S;
- Merckx, Y;
- Merten, L;
- Micallef, J;
- Montaruli, T;
- Moore, RW;
- Morii, Y;
- Morse, R;
- Moulai, M;
- Mukherjee, T;
- Naab, R;
- Nagai, R;
- Nakos, M;
- Naumann, U;
- Necker, J;
- Neumann, M;
- Niederhausen, H;
- Nisa, MU;
- Noell, A;
- Nowicki, SC;
- Pollmann, A Obertacke;
- O’Dell, V;
- Oehler, M;
- Oeyen, B;
- Olivas, A;
- Orsoe, R;
- Osborn, J;
- O’Sullivan, E;
- Pandya, H;
- Park, N;
- Parker, GK;
- Paudel, EN;
- Paul, L;
- de los Heros, C Pérez;
- Peterson, J;
- Philippen, S;
- Pieper, S;
- Pizzuto, A;
- Plum, M;
- Pontén, A;
- Popovych, Y;
- Rodriguez, M Prado;
- Pries, B;
- Procter-Murphy, R;
- Przybylski, GT;
- Rack-Helleis, J;
- Rawlins, K;
- Rechav, Z;
- Rehman, A;
- Reichherzer, P;
- Renzi, G;
- Resconi, E;
- Reusch, S;
- Rhode, W;
- Richman, M;
- Riedel, B;
- Roberts, EJ;
- Robertson, S;
- Rodan, S;
- Roellinghoff, G;
- Rongen, M;
- Rott, C;
- Ruhe, T;
- Ruohan, L;
- Ryckbosch, D;
- Athanasiadou, S;
- Safa, I;
- Saffer, J;
- Salazar-Gallegos, D;
- Sampathkumar, P;
- Herrera, SE Sanchez;
- Sandrock, A;
- Santander, M;
- Sarkar, S;
- Sarkar, S;
- Savelberg, J;
- Savina, P;
- Schaufel, M;
- Schieler, H;
- Schindler, S;
- Schlüter, B;
- Schlüter, F;
- Schmidt, T;
- Schneider, J;
- Schröder, FG;
- Schumacher, L;
- Schwefer, G;
- Sclafani, S;
- Seckel, D;
- Seunarine, S;
- Shah, R;
- Sharma, A;
- Shefali, S;
- Shimizu, N;
- Silva, M;
- Skrzypek, B;
- Smithers, B;
- Snihur, R;
- Soedingrekso, J;
- Søgaard, A;
- Soldin, D;
- Sommani, G;
- Spannfellner, C;
- Spiczak, GM;
- Spiering, C;
- Stamatikos, M;
- Stanev, T;
- Stezelberger, T;
- Stürwald, T;
- Stuttard, T;
- Sullivan, GW;
- Taboada, I;
- Ter-Antonyan, S;
- Thompson, WG;
- Thwaites, J;
- Tilav, S;
- Tollefson, K;
- Tönnis, C;
- Toscano, S;
- Tosi, D;
- Trettin, A;
- Tung, CF;
- Turcotte, R;
- Twagirayezu, JP;
- Ty, B;
- Elorrieta, MA Unland;
- Upadhyay, AK;
- Upshaw, K;
- Valtonen-Mattila, N;
- Vandenbroucke, J;
- van Eijndhoven, N;
- Vannerom, D;
- van Santen, J;
- Vara, J;
- Veitch-Michaelis, J;
- Venugopal, M;
- Verpoest, S;
- Veske, D;
- Walck, C;
- Watson, TB;
- Weaver, C;
- Weigel, P;
- Weindl, A;
- Weldert, J;
- Wendt, C;
- Werthebach, J;
- Weyrauch, M;
- Whitehorn, N;
- Wiebusch, CH;
- Willey, N;
- Williams, DR;
- Wolf, M;
- Wrede, G;
- Xu, XW;
- Yanez, JP;
- Yildizci, E;
- Yoshida, S;
- Yu, F;
- Yu, S;
- Yuan, T;
- Zhang, Z;
- Zhelnin, P
IceCat-1: The IceCube Event Catalog of Alert Tracks
- Abbasi, R;
- Ackermann, M;
- Adams, J;
- Agarwalla, SK;
- Aguilar, JA;
- Ahlers, M;
- Alameddine, JM;
- Amin, NM;
- Andeen, K;
- Anton, G;
- Argüelles, C;
- Ashida, Y;
- Athanasiadou, S;
- Axani, SN;
- Bai, X;
- Balagopal, A;
- Baricevic, M;
- Barwick, SW;
- Basu, V;
- Bay, R;
- Beatty, JJ;
- Becker, K-H;
- Tjus, J Becker;
- Beise, J;
- Bellenghi, C;
- BenZvi, S;
- Berley, D;
- Bernardini, E;
- Besson, DZ;
- Binder, G;
- Bindig, D;
- Blaufuss, E;
- Blot, S;
- Bontempo, F;
- Book, JY;
- Meneguolo, C Boscolo;
- Böser, S;
- Botner, O;
- Böttcher, J;
- Bourbeau, E;
- Braun, J;
- Brinson, B;
- Brostean-Kaiser, J;
- Burley, RT;
- Busse, RS;
- Butterfield, D;
- Campana, MA;
- Carloni, K;
- Carnie-Bronca, EG;
- Chattopadhyay, S;
- Chau, N;
- Chen, C;
- Chen, Z;
- Chirkin, D;
- Choi, S;
- Clark, BA;
- Classen, L;
- Coleman, A;
- Collin, GH;
- Connolly, A;
- Conrad, JM;
- Coppin, P;
- Correa, P;
- Countryman, S;
- Cowen, DF;
- Dave, P;
- De Clercq, C;
- DeLaunay, JJ;
- Delgado, D;
- Dembinski, H;
- Deng, S;
- Deoskar, K;
- Desai, A;
- Desiati, P;
- de Vries, KD;
- de Wasseige, G;
- DeYoung, T;
- Diaz, A;
- Díaz-Vélez, JC;
- Dittmer, M;
- Domi, A;
- Dujmovic, H;
- DuVernois, MA;
- Ehrhardt, T;
- Eller, P;
- Engel, R;
- Erpenbeck, H;
- Evans, J;
- Evenson, PA;
- Fan, KL;
- Fang, K;
- Farrag, K;
- Fazely, AR;
- Fedynitch, A;
- Feigl, N;
- Fiedlschuster, S;
- Finley, C;
- Fischer, L;
- Fox, D;
- Franckowiak, A;
- Friedman, E;
- Fritz, A;
- Fürst, P;
- Gaisser, TK;
- Gallagher, J;
- Ganster, E;
- Garcia, A;
- Gerhardt, L;
- Ghadimi, A;
- Glaser, C;
- Glauch, T;
- Glüsenkamp, T;
- Goehlke, N;
- Gonzalez, JG;
- Goswami, S;
- Grant, D;
- Gray, SJ;
- Griffin, S;
- Griswold, S;
- Günther, C;
- Gutjahr, P;
- Haack, C;
- Hallgren, A;
- Halliday, R;
- Halve, L;
- Halzen, F;
- Hamdaoui, H;
- Minh, M Ha;
- Hanson, K;
- Hardin, J;
- Harnisch, AA;
- Hatch, P;
- Haungs, A;
- Helbing, K;
- Hellrung, J;
- Henningsen, F;
- Heuermann, L;
- Heyer, N;
- Hickford, S;
- Hidvegi, A;
- Hill, C;
- Hill, GC;
- Hoffman, KD;
- Hoshina, K;
- Hou, W;
- Huber, T;
- Hultqvist, K;
- Hünnefeld, M;
- Hussain, R;
- Hymon, K;
- In, S;
- Ishihara, A;
- Jacquart, M;
- Janik, O;
- Jansson, M;
- Japaridze, GS;
- Jayakumar, K;
- Jeong, M;
- Jin, M;
- Jones, BJP;
- Kang, D;
- Kang, W;
- Kang, X;
- Kappes, A;
- Kappesser, D;
- Kardum, L;
- Karg, T;
- Karl, M;
- Karle, A;
- Katz, U;
- Kauer, M;
- Kelley, JL;
- Zathul, A Khatee;
- Kheirandish, A;
- Kiryluk, J;
- Klein, SR;
- Kochocki, A;
- Koirala, R;
- Kolanoski, H;
- Kontrimas, T;
- Köpke, L;
- Kopper, C;
- Koskinen, DJ;
- Koundal, P;
- Kovacevich, M;
- Kowalski, M;
- Kozynets, T;
- Kruiswijk, K;
- Krupczak, E;
- Kumar, A;
- Kun, E;
- Kurahashi, N;
- Lad, N;
- Gualda, C Lagunas;
- Lamoureux, M;
- Larson, MJ;
- Lauber, F;
- Lazar, JP;
- Lee, JW;
- DeHolton, K Leonard;
- Leszczyńska, A;
- Lincetto, M;
- Liu, QR;
- Liubarska, M;
- Lohfink, E;
- Love, C;
- Mariscal, CJ Lozano;
- Lu, L;
- Lucarelli, F;
- Ludwig, A;
- Luszczak, W;
- Lyu, Y;
- Madsen, J;
- Mahn, KBM;
- Makino, Y;
- Manao, E;
- Mancina, S;
- Sainte, W Marie;
- Mariş, IC;
- Marka, S;
- Marka, Z;
- Marsee, M;
- Martinez-Soler, I;
- Maruyama, R;
- Mayhew, F;
- McElroy, T;
- McNally, F;
- Mead, JV;
- Meagher, K;
- Mechbal, S;
- Medina, A;
- Meier, M;
- Merckx, Y;
- Merten, L;
- Micallef, J;
- Montaruli, T;
- Moore, RW;
- Morii, Y;
- Morse, R;
- Moulai, M;
- Mukherjee, T;
- Naab, R;
- Nagai, R;
- Nakos, M;
- Naumann, U;
- Necker, J;
- Neumann, M;
- Niederhausen, H;
- Nisa, MU;
- Noell, A;
- Nowicki, SC;
- Pollmann, A Obertacke;
- O’Dell, V;
- Oehler, M;
- Oeyen, B;
- Olivas, A;
- Orsoe, R;
- Osborn, J;
- O’Sullivan, E;
- Pandya, H;
- Park, N;
- Parker, GK;
- Paudel, EN;
- Paul, L;
- de los Heros, C Pérez;
- Peterson, J;
- Philippen, S;
- Pieper, S;
- Pizzuto, A;
- Plum, M;
- Pontén, A;
- Popovych, Y;
- Rodriguez, M Prado;
- Pries, B;
- Procter-Murphy, R;
- Przybylski, GT;
- Rack-Helleis, J;
- Rawlins, K;
- Rechav, Z;
- Rehman, A;
- Reichherzer, P;
- Renzi, G;
- Resconi, E;
- Reusch, S;
- Rhode, W;
- Richman, M;
- Riedel, B;
- Roberts, EJ;
- Robertson, S;
- Rodan, S;
- Roellinghoff, G;
- Rongen, M;
- Rott, C;
- Ruhe, T;
- Ruohan, L;
- Ryckbosch, D;
- Safa, I;
- Saffer, J;
- Salazar-Gallegos, D;
- Sampathkumar, P;
- Herrera, SE Sanchez;
- Sandrock, A;
- Santander, M;
- Sarkar, S;
- Sarkar, S;
- Savelberg, J;
- Savina, P;
- Schaufel, M;
- Schieler, H;
- Schindler, S;
- Schlüter, B;
- Schlüter, F;
- Schmidt, T;
- Schneider, J;
- Schröder, FG;
- Schumacher, L;
- Schwefer, G;
- Sclafani, S;
- Seckel, D;
- Seunarine, S;
- Shah, R;
- Sharma, A;
- Shefali, S;
- Shimizu, N;
- Silva, M;
- Skrzypek, B;
- Smithers, B;
- Snihur, R;
- Soedingrekso, J;
- Søgaard, A;
- Soldin, D;
- Sommani, G;
- Spannfellner, C;
- Spiczak, GM;
- Spiering, C;
- Stamatikos, M;
- Stanev, T;
- Stezelberger, T;
- Stürwald, T;
- Stuttard, T;
- Sullivan, GW;
- Taboada, I;
- Ter-Antonyan, S;
- Thiesmeyer, M;
- Thompson, WG;
- Thwaites, J;
- Tilav, S;
- Tollefson, K;
- Tönnis, C;
- Toscano, S;
- Tosi, D;
- Trettin, A;
- Tung, CF;
- Turcotte, R;
- Twagirayezu, JP;
- Ty, B;
- Elorrieta, MA Unland;
- Upadhyay, AK;
- Upshaw, K;
- Valtonen-Mattila, N;
- Vandenbroucke, J;
- van Eijndhoven, N;
- Vannerom, D;
- van Santen, J;
- Vara, J;
- Veitch-Michaelis, J;
- Venugopal, M;
- Verpoest, S;
- Veske, D;
- Walck, C;
- Watson, TB;
- Weaver, C;
- Weigel, P;
- Weindl, A;
- Weldert, J;
- Wendt, C;
- Werthebach, J;
- Weyrauch, M;
- Whitehorn, N;
- Wiebusch, CH;
- Willey, N;
- Williams, DR;
- Wolf, A;
- Wolf, M;
- Wrede, G;
- Xu, XW;
- Yanez, JP;
- Yildizci, E;
- Yoshida, S;
- Yu, F;
- Yu, S;
- Yuan, T;
- Zhang, Z;
- Zhelnin, P
A low noise CMOS camera system for 2D resonant inelastic soft X-ray scattering

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