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Scholarly Works (6 results)
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Article
Substrate cooling efficiency during cryogenic inductively coupled plasma polymer etching for diffractive optics on membranes
Olynick, Deirdre L.
;
Anderson, Erik H.
;
Harteneck, Bruce
;
Veklerov, Eugene
LBL Publications
(2001)
Article
High-resolution and high-efficiency phase zone plate for EUV applications
Chao, Weilun
;
Anderson, Erik H.
;
Harteneck, Bruce
;
Olynick, Deirdre
;
Salmassi, Farhad
;
Attwood, David
LBL Publications
(2002)
Article
Experimental analysis of high-resolution soft x-ray microscopy
Chao, Weilun
;
Anderson, Erik H.
;
Denbeaux, Gregory
;
Harteneck, Bruce
;
Pearson, Angelic L.
;
Olynick, Deirdre
;
Schneider, Gerd
;
Attwood, David
Lawrence Berkeley National Laboratory
(2001)
Article
Preparations for EUV interferometry of the 0.3 NA MET optic
Goldberg, Kenneth A.
;
Naulleau, Patrick P.
;
Denham, Paul E.
;
Rekawa, Senajith B.
;
Jackson, Keith H.
;
Liddle, J. Alexander
;
Harteneck, Bruce
;
Gullikson, Eric
;
Anderson, Erik H.
LBL Publications
(2003)
Article
Lithographic characterization of the printability of programmed EUV substrate defects
Naulleau, Patrick
;
Goldberg, Kenneth A.
;
Anderson, Erik H.
;
Bokor, Jeffrey
;
Gullikson, Eric
;
Harteneck, Bruce
;
Jackson, Keith
;
Olynick, Deirdre
;
Salmassi, Farhad
;
Baker, Sherry
;
Mirkarimi, Paul
;
Spiller, Eberhard
;
Walton, Chris
;
Zhang, Guojing
LBL Publications
(2002)
Article
Static EUV microexposures using the ETS Set-2 optics
Naulleau, Partick
;
Goldberg, Kenneth A.
;
Anderson, Erik H.
;
Bokor, Jeffrey
;
Harteneck, Bruce
;
Jackson, Keith
;
Olynick, Deirdre
;
Salmassi, Farhad
;
Baker, Sherry
;
Mirkarimi, Paul
;
Spiller, Eberhard
;
Walton, Chris
;
O'Connell, Donna
;
Yan, Pei-Yang
;
Zhang, Guojing
LBL Publications
(2003)
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