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eScholarship
Open Access Publications from the University of California

Scholarly Works (29 results)

  • Article
LBL Publications (2009)
    Cover page: Don't always blame the photons: Relationships between deprotection blur, LER, and shot noise in EUV photoresists
    • Article
    Lawrence Berkeley National Laboratory (2011)
      Cover page: The SEMATECH Berkeley MET: extending EUV learning to 16-nm half pitch
      • Article
      LBL Publications (2009)
        Cover page: Corner Rounding in Photoresists for Extreme Ultraviolet Lithography
        • Article
        Lawrence Berkeley National Laboratory (2008)
          Cover page: Tilt sensitivity of the two-grating interferometer
          • Article
          LBL Publications (2009)
            Cover page: Extreme ultraviolet lithography: A few more pieces of the puzzle
            • Article
            Lawrence Berkeley National Laboratory (2011)
              Cover page: Low-speckle holographic beam shaping of high-coherence EUV sources
              • Article
              Lawrence Berkeley National Laboratory (2008)
                Cover page: Deprotection blue in extreme ultraviolet photoresists: influence of base loading and post-exposure bake temperture
                • Article
                LBL Publications (2009)
                  Cover page: Influence of base and PAG on deprotection blur in EUV photoresists and some thoughts on shot noise
                  • Article
                  LBL Publications (2010)
                    Cover page: A detailed study of three champion EUV photoresists
                    • Article
                    • Peer Reviewed
                    UCLA Previously Published Works (2013)
                      Cover page: Multiple routes to reduced interspecific territorial fighting in Hetaerina damselflies
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