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Scholarly Works (28 results)
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Article
Silicon nitride zoneplates and packaging for extreme ultraviolet instruments
Anderson, Erik H.
Lawrence Berkeley National Laboratory
(2013)
Article
Peer Reviewed
Soft X-Ray Imaging of spin dynamics at high spatial and temporal resolution
Mesler, Brooke L.
;
Fischer, Peter
;
Chao, Weilun
;
Anderson, Erik H.
Lawrence Berkeley National Laboratory
(2007)
Article
Substrate cooling efficiency during cryogenic inductively coupled plasma polymer etching for diffractive optics on membranes
Olynick, Deirdre L.
;
Anderson, Erik H.
;
Harteneck, Bruce
;
Veklerov, Eugene
LBL Publications
(2001)
Article
Towards sub-10 nm resolution zone plates using the overlay nanofabrication processes
Chao, Weilun
;
Anderson, Erik H.
;
Fischer, Peter
;
Kim, Dong-Hyun
Lawrence Berkeley National Laboratory
(2008)
Article
Magnetic soft x-ray microscopy-imaging fast spin dynamics in magnetic nanostructures
Fischer, Peter
;
Kim, Dong-Hyun
;
Mesler, Brooke L.
;
Chao, Weilun
;
Sakdinawat, Anne E.
;
Anderson, Erik H.
LBL Publications
(2007)
Article
Study of etch processes for the fabrication of extreme ultraviolet phase-only diffraction elements
Salmassi, Farhad
;
Anderson, Erik H.
;
Gullikson, Eric M.
;
Naulleau, Patrick P.
LBL Publications
(2007)
Article
High-resolution and high-efficiency phase zone plate for EUV applications
Chao, Weilun
;
Anderson, Erik H.
;
Harteneck, Bruce
;
Olynick, Deirdre
;
Salmassi, Farhad
;
Attwood, David
LBL Publications
(2002)
Article
Increased depth of field through wave-front coding: using an off-axis zone plate lens with cubic phase modulation in an EUV microscope
Benk, Markus P.
;
Goldberg, Kenneth A.
;
Mochi, Iacopo
;
Chao, Weilun
;
Anderson, Erik H.
LBL Publications
(2013)
Article
Direct index of refraction measurement at extreme ultraviolet wavelength region with a novel interferometer
Chang, Chang
;
Anderson, Erik H.
;
Naulleau, Patrick P.
;
Gullikson, Eric
;
Goldberg, Kenneth A.
;
Attwood, David T.
LBL Publications
(2001)
Article
Resists for next generation lithography
Brainard, Robert L.
;
Barclay, George G.
;
Anderson, Erik H.
;
Ocola, Leonidas E.
LBL Publications
(2001)
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