- Olynick, Deirdre L;
- Perera, Pradeep;
- Schwartzberg, Adam;
- Kulshreshta, Prashant;
- De Oteyza, Dimas G;
- Jarnagin, Nathan;
- Henderson, Cliff;
- Sun, Zhiwei;
- Gunkel, Ilja;
- Russell, Thomas;
- Budden, Matthias;
- Rangelow, Ivo W
Previously, we demonstrated an all dry, selective laser ablation development in methyl acetoxy calixarene (MAC6) which produced high resolution (15-25 nm half-pitch), high aspect ratio features not achievable with wet development. In this paper, we investigate the selective laser ablation process as a means to create a block copolymer derived lithographic pattern through the selective removal of one block. Two block copolymer systems were investigated PS-b-PHOST, and P2VP-b-PS-b-P2VP. The selective laser ablations process on block copolymers offers an alternative to plasma etching when plasma etching is not effective.