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Scholarly Works (15 results)
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Article
A design study for synchrotron-based high-numerical-aperture scanning illuminators
Naulleau, Patrick P.
;
Denham, Paul E.
LBL Publications
(2003)
Article
Peer Reviewed
Design and implementation of a vacuum compatible laser-based sub-nm resolution absolute distance measurement gauge
Naulleau, Patrick P.
;
Denham, Paul E.
;
Rekawa, Senajith
Lawrence Berkeley National Laboratory
(2004)
Article
Advanced 0.3-NA EUV lithography capabilities at the ALS
Naulleau, Patrick
;
Anderson, Erik
;
Dean, Kim
;
Denham, Paul
;
Goldberg, Kenneth A.
;
Hoef, Brian
;
Jackson, Keith
LBL Publications
(2005)
Article
Peer Reviewed
Characterization of the synchrotron-based 0.3-NA EUV microexposure tool at the ALS
Naulleau, Patrick
;
Goldberg, Kenneth A.
;
Anderson, Erik
;
Dean, Kim
;
Denham, Paul
;
Cain, Jason P.
;
Hoef, Brian
;
Jackson, Keith
LBL Publications
(2005)
Article
At-wavelength interferometry of high-NA diffraction-limited EUV optics
Goldberg, Kenneth A.
;
Naulleau, Patrick
;
Rekawa, Senajith
;
Denham, Paul
;
Liddle, J. Alexander
;
Anderson, Erik
;
Jackson, Keith
;
Bokor, Jeffrey
;
Attwood, David
Lawrence Berkeley National Laboratory
(2003)
Article
Adding static printing capabilities to the EUV phase-shifting point diffraction interferometer
Naulleau, Patrick
;
Goldberg, Kenneth A.
;
Anderson, Erik H.
;
Batson, Phillip
;
Denham, Paul
;
Jackson, Keith
;
Rekawa, Seno
;
Bokor, Jeffery
Lawrence Berkeley National Laboratory
(2001)
Article
Advanced resist testing using the Berkeley extreme ultraviiolet microfiled exposure tool
Naulleau, Patrick P.
;
Anderson, Chris N.
;
Dean, Kim
;
Denham, Paul
;
Goldberg, Kenneth A.
;
Hoef, Brian
;
Fontaine, Bruno La
;
Wallow, Tom
LBL Publications
(2007)
Article
Contamination removal using the Evactron(R) De-contaminator
Morgan, Christopher G.
;
Vane, Ronald
;
Rekawa, Senajith B.
;
Denham, Paul E.
;
Hoef, Brian H.
;
Jones, Michael S.
;
Naulleau, Patrick
LBL Publications
(2010)
Article
Investigation of the current resolution limits of advanced EUV resists
Naulleau, Patrick
;
Rammeloo, Clemens
;
Cain, Jason P.
;
Dean, Kim
;
Denham, Paul
;
Goldberg, Kenneth A.
;
Hoef, Brian
;
La Fontaine, Bruno
;
Pawloski, Adam
;
Larson, Carl
;
Wallraff, Greg
LBL Publications
(2005)
Article
The SEMATECH Berkeley MET: Bridging the gap to 16-nm half pitch development
Naulleau, Patrick
;
Anderson, Christopher
;
Baclea-an, Lorie Mae
;
Denham, Paul
;
George, Simi
;
Goldberg, Kenneth A.
;
Hoef, Brian
;
Jones, Gideon
;
McClinton, Brittney
;
Miyakawa, Ryan
;
Montgomery, Warren
;
Rekawa, Seno
;
Wallow, Tom
LBL Publications
(2010)
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