We demonstrate two patterning techniques based on hydrogen passivation of Ga1-xMnxAs to produce isolated ferromagnetically active regions embedded uniformly in a paramagnetic, insulating host. The first method consists of selective hydrogenation of Ga1-xMnxAs by lithographic masking. Magnetotransport measurements of Hall-bars made in this manner display the characteristic properties of the hole-mediated ferromagnetic phase, which result from good pattern isolation. Arrays of Ga1-xMnxAs dots as small as 250 nm across have been realized by this process. The second process consists of blanket hydrogenation of Ga1-xMnxAs followed by local reactivation using confined low-power pulsed-laser annealing. Conductance imaging reveals local electrical reactivation of micrometer-sized regions that accompanies the restoration of ferromagnetism. The spatial resolution achievable with this method can potentially reach <100 nm by employing near-field laser processing. The high spatial resolution attainable by hydrogenation patterning enables the development of systems with novel functionalities such as lateral spin-injection as well as the exploration of magnetization dynamics in individual and coupled structures made from this novel class of semiconductors. © 2007 Elsevier B.V. All rights reserved.

We present a detailed investigation of the magnetic and magnetotransport properties of thin films of ferromagnetic Ga1-x Mnx As synthesized using ion implantation and pulsed-laser melting (II-PLM). The field and temperature-dependent magnetization, magnetic anisotropy, temperature-dependent resistivity, magnetoresistance, and Hall effect of II-PLM Ga1-x Mnx As films have all of the characteristic signatures of the strong p-d interaction of holes and Mn ions observed in the dilute hole-mediated ferromagnetic phase. The ferromagnetic and electrical transport properties of II-PLM films correspond to the peak substitutional Mn concentration meaning that the nonuniform Mn depth distribution is unimportant in determining the film properties. Good quantitative agreement is found with films grown by low temperature molecular beam epitaxy and having the similar substitutional MnGa composition. Additionally, we demonstrate that II-PLM Ga1-x Mnx As films are free from interstitial MnI because of the high-temperature processing. At high Mn implantation doses, the kinetics of solute redistribution during solidification alone determine the maximum resulting MnGa concentration. Uniaxial anisotropy between in-plane [1- 10] and [110] directions is present in II-PLM Ga1-x Mnx As giving evidence for this being an intrinsic property of the carrier-mediated ferromagnetic phase. © 2008 American Institute of Physics.