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Scholarly Works (3 results)
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Article
Detectability and printability of EUVL mask blank defects for the 32 nm HP node
Cho, Wonil
;
Han, Hak-Seung
;
Goldberg, Kenneth A.
;
Kearney, Patrick A.
;
Jeon, Chan-Uk
Lawrence Berkeley National Laboratory
(2007)
Article
Performance of actinic EUVL mask imaging using a zoneplate microscope
Goldberg, Kenneth A.
;
Naulleau, Patrick P.
;
Barty, Anton
;
Rekawa, Senajith B.
;
Kemp, Charles D.
;
Gunion, Robert F.
;
Salmassi, Farhad
;
Gullikson, Eric M.
;
Anderson, Erik H.
;
Han, Hak-Seung
Lawrence Berkeley National Laboratory
(2007)
Article
Actinic Inspection of EUV Programmed Multilayer Defects and Cross-comparison Measurements
Goldberg, Kenneth A.
;
Barty, Anton
;
Liu, Yanwei
;
Kearney, Patrick
;
Tezuka, Yoshihiro
;
Terasawa, Tsuneo
;
Taylor, John S.
;
Han, Hak-Seung
;
Wood II, Obert R.
Lawrence Berkeley National Laboratory
(2006)
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