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eScholarship
Open Access Publications from the University of California

Scholarly Works (8 results)

  • Article
LBL Publications (2005)
    Cover page: Advanced 0.3-NA EUV lithography capabilities at the ALS
    • Article
    • Peer Reviewed
    LBL Publications (2005)
      Cover page: Characterization of the synchrotron-based 0.3-NA EUV microexposure tool at the ALS
      • Article
      LBL Publications (2007)
        Cover page: Advanced resist testing using the Berkeley extreme ultraviiolet microfiled exposure tool
        • Article
        LBL Publications (2010)
          Cover page: Contamination removal using the Evactron(R) De-contaminator
          • Article
          LBL Publications (2005)
            Cover page: Printing EUV Phase-shift Masks using the 0.3NA Berkeley Micro-exposure Tool
            • Article
            LBL Publications (2010)
              Cover page: The SEMATECH Berkeley MET: Bridging the gap to 16-nm half pitch development
              • Article
              LBL Publications (2005)
                Cover page: Investigation of the current resolution limits of advanced EUV resists
                • Article
                Lawrence Berkeley National Laboratory (2005)
                  Cover page: EUV microexposures at the ALS using the 0.3-NA MET projection optics
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