- Gao, Maodong;
- Yang, Qi-Fan;
- Ji, Qing-Xin;
- Wang, Heming;
- Wu, Lue;
- Shen, Boqiang;
- Liu, Junqiu;
- Huang, Guanhao;
- Chang, Lin;
- Xie, Weiqiang;
- Yu, Su-Peng;
- Papp, Scott B;
- Bowers, John E;
- Kippenberg, Tobias J;
- Vahala, Kerry J
Optical microresonators with high quality (Q) factors are essential to a wide range of integrated photonic devices. Steady efforts have been directed towards increasing microresonator Q factors across a variety of platforms. With success in reducing microfabrication process-related optical loss as a limitation of Q, the ultimate attainable Q, as determined solely by the constituent microresonator material absorption, has come into focus. Here, we report measurements of the material-limited Q factors in several photonic material platforms. High-Q microresonators are fabricated from thin films of SiO2, Si3N4, Al0.2Ga0.8As, and Ta2O5. By using cavity-enhanced photothermal spectroscopy, the material-limited Q is determined. The method simultaneously measures the Kerr nonlinearity in each material and reveals how material nonlinearity and ultimate Q vary in a complementary fashion across photonic materials. Besides guiding microresonator design and material development in four material platforms, the results help establish performance limits in future photonic integrated systems.