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eScholarship
Open Access Publications from the University of California

Scholarly Works (7 results)

  • Article
  • Peer Reviewed
Lawrence Berkeley National Laboratory (2010)
    Cover page: EUV actinic defect inspection and defect printability at the sub-32 nm half pitch
    • Article
    Lawrence Berkeley National Laboratory (2009)
      Cover page: Mask defect verification using actinic inspection and defect mitigation technology
      • Article
      LBL Publications (2009)
        Cover page: Wavelength-specific reflections: a decade of EUV mask inspection research
        • Article
        LBL Publications (2010)
          Cover page: Progress in actinic mask imaging: the closest look at lines, defects in phase roughness
          • Article
          LBL Publications (2008)
            Cover page: Extendibility using EUV actinic inspection tool for sub-32-nm node
            • Article
            LBL Publications (2008)
              Cover page: Aerial image linewidth measurement capabilities of the actinic inspection tool
              • Article
              LBL Publications (2010)
                Cover page: Native blank defect analysis for the study of printability
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