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Scholarly Works (4 results)
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Article
Plasma ion sources and ion beam technology in microfabrications
Ji, Lili
LBL Publications
(2007)
Article
Formation of Nanopore-Arrays by Plasma-based Thin Film Deposition
Ji, Qing
;
Chen, Y.
;
Jiang, Ximan
;
Ji, Lili
;
Leung, K.N.
LBL Publications
(2008)
Article
Resolution improvement for the maskless micro-ion beam reduction lithography systems
Jiang, Ximan
;
Ji, Qing
;
Ji, Lili
;
Chang, Audrey
;
Leung, Ka-Ngo
LBL Publications
(2003)
Article
Conformal Deep Trench Coating with both Conducting and Insulating Materials
Ji, Lili
;
Kim, Jung-Kuk
;
Ji, Qing
;
Leung, Ka-Ngo
;
Chen, Ye
;
Gough, Rick A.
LBL Publications
(2006)
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