The use of microelectromechanical systems (MEMS) technology in medical and biological applications has increased dramatically in the past decade due to the potential for enhanced sensitivity, functionality, and performance associated with the miniaturization of devices, as well as the market potential for low-cost, personalized medicine. However, the utility of such devices in clinical medicine is ultimately limited due to factors associated with prevailing micromachined materials such as silicon, as it poses concerns of safety and reliability due to its intrinsically brittle properties, making it prone to catastrophic failure. Recent advances in titanium (Ti) micromachining provides an opportunity to create devices with enhanced safety and performance due to its proven biocompatibility and high fracture toughness, which causes it to fail by means of graceful, plasticity-based deformation. Motivated by this opportunity, we discuss our efforts to advance Ti MEMS technology in two ways: 1) Through the development of titanium-based microneedles (MNs) that seek to provide a safer, simpler, and more efficacious means of ocular drug delivery, and 2) Through the advancement of Ti anodic bonding for future realization of robust microfluidic devices for photocatalysis applications.

As for the first of these thrusts, we show that MN devices with in-plane geometry and through-thickness fenestrations that serve as drug reservoirs for passive delivery via diffusive transport from fast-dissolving coatings can be fabricated utilizing Ti deep reactive ion etching (Ti DRIE). Our mechanical testing and finite element analysis (FEA) results suggest that these devices possess sufficient stiffness for reliable corneal insertion. Our MN coating studies show that, relative to solid MNs of identical shank dimension, fenestrated devices can increase drug carrying capacity by 5-fold. Furthermore, we demonstrate that through-etched fenestrations provide a protective cavity for delivering drugs subsurface, thereby enhancing delivery efficiencies in an ex vivo rabbit cornea model. Collectively, these results show the potential embodied in developing Ti MNs for effective, minimally invasive, and low-cost ocular drug delivery.

Additionally, or the second of these thrusts, we report the development of an anodic bonding process that allows, for the first time, high-strength joining of bulk Ti and glass substrates at the wafer-scale, without need for interlayers or adhesives. We demonstrate that uniform, full-wafer bonding can be achieved at temperatures as low as 250°C, and that failure during burst pressure testing occurs via crack propagation through the glass, rather than the Ti/glass interface, thus demonstrating the robustness of the bonding. Moreover, using optimized bonding conditions, we demonstrate the fabrication of rudimentary Ti/glass-based microfluidic devices at the wafer-scale, and their leak-free operation under pressure-driven flow. Finally, we demonstrate the monolithic integration of nanoporous titanium dioxide within such devices, thus illustrating the promise embodied in Ti anodic bonding for future realization of robust microfluidic devices for photocatalysis applications. Together, these results demonstrate the potential embodied in utilizing Ti MEMS technology for the fabrication of novel drug delivery and microfluidic systems with enhanced robustness, safety, and performance.