Burrs have been defined as undesirable projections of material beyond the edge of a workpiece during machining. Burrs are created around the edge of workpiece due to plasticity during mechanical manufacturing process. Recently, because of miniaturization and increased precision of the machined parts, the size of burrs has been also reduced and deburring became even more difficult. Generally, burrs have been removed by method of physics and chemistry. There are a few publications in the area of applying ultrasonics to deburring. When ultrasonic vibration propagates in the liquid medium, a large number of bubbles are formed. These bubbles generate an extremely strong force, which removes burrs. The object of this study is to analyze the effects of ultrasonic vibration, medium and the type of abrasive in deburring process. In this paper, we have examined such parameters of ultrasonic vibration as power, the distance between the ultrasonic horn and workpiece, deburring elapsed time, and the type of abrasive. The different abrasives were used in this experiment to examine how the properties of the abrasives affect ultrasonic deburring. It was found from the result that deburring with ultrasonic cavitation in medium is effective to micro burr.