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Scholarly Works (16 results)
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Article
Pattern transfer of sub-20 nm features with gas-chopping in an ICP reactor
Liddle, J.A.
LBL Publications
(2005)
Article
Sub-pixel alignment for direct write electron beam lithography
Anderson, E.H.
;
Ha, D.
;
Liddle, J.A.
LBL Publications
(2003)
Article
EUV focus sensor design optimization
Goldberg, K.A.
;
Teyssier, M.E.
;
Liddle, J.A.
;
Naulleau, P.P.
LBL Publications
(2005)
Article
EUV Binary Phase Gratings: Fabrication and Application to Diffractive Optics
Salmassi, F.
;
Naulleau, P.P.
;
Gullikson, E.M.
;
Olynick, D.L.
;
Liddle, J.A.
LBL Publications
(2005)
Article
Development of single electron transistors as sensitive charge sensors for impurity spin quantum bits in silicon
Park, S.J.
;
Liddle, J.A.
;
Persaud, A.
;
Schenkel, T.
;
Meng, X.
;
Bokor, J.
LBL Publications
(2004)
Article
Fabrication and performance of nanoscale ultra-smooth programmed defects for EUV Lithography
Olynick, D.L.
;
Salmassi, F.
;
Liddle, J.A.
;
Mirkarimi, P.B.
;
Spiller, E.
;
Baker, S.L.
;
Robinson, J.
LBL Publications
(2008)
Article
Peer Reviewed
Integration of scanning probes and ion beams
Persaud, A.
;
Park, S.J.
;
Liddle, J.A.
;
Schenkel, T.
;
Bokor, J.
;
Rangelow, I.
Lawrence Berkeley National Laboratory
(2005)
Article
Ion Implantation with Scanning Probe Alignment
Persaud, A.
;
Liddle, J.A.
;
Schenkel, T.
;
Bokor, J.
;
Ivanov, Tzv.
;
Rangelow, I.W.
Lawrence Berkeley National Laboratory
(2005)
Article
Shot noise models for sequential processes and the role of lateral mixing
Neureuther, A.R.
;
Pease, R.F.W.
;
Yuan, L.
;
Parizi, K. Baghbani
;
Esfandyarpour, H .
;
Poppe, W.J.
;
Liddle, J.A.
;
Anderson, E.H.
LBL Publications
(2006)
Article
Electrical activation and spin coherence of ultra low dose antimony implants in silicon
Schenkel, T.
;
Tyryshkin, A.M.
;
de Sousa, R.
;
Whaley, K.B.
;
Bokor, J.
;
Liddle, J.A.
;
Persaud, A.
;
Shangkuan, J.
;
Chakarov, I.
;
Lyon, S.A.
Lawrence Berkeley National Laboratory
(2005)
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