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Open Access Publications from the University of California

Scholarly Works (3 results)

  • Article
  • Peer Reviewed
LBL Publications (2001)
    Cover page: HRTEM image simulations for the study of ultra-thin gate oxides
    • Article
    LBL Publications (2000)
      Cover page: HRTEM image simulations for gate oxide metrology
      • Article
      LBL Publications (2000)

      We have performed high-resolution transmission electron microscope image simulations to assess the visibility of various structural defects in gate oxides at electron microscope resolutions.

        Cover page: HRTEM image simulations of structural defects in gate oxides
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