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Scholarly Works (12 results)
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Article
Mask Shadowing and the Line-edge Transfer Function
McClinton, Brittany
Lawrence Berkeley National Laboratory
(2012)
Article
Absorber height effects on SWA restrictions and 'Shadow' LER
McClinton, Brittany
Lawrence Berkeley National Laboratory
(2011)
Article
Simplified models for mask roughness induced LER
McClinton, Brittany
LBL Publications
(2011)
Article
LER control and mitigation: mask roughness induced LER
McClinton, Brittany
LBL Publications
(2011)
Article
The SEMATECH Berkeley MET & DCT: a quest for 14-nm half-pitch in chemically amplified resist, OOB contrast of EUV resists, and 6.x-nm lithography
McClinton, Brittany
LBL Publications
(2012)
Article
Peer Reviewed
Mask roughness induced LER: a rule of thumb -- paper
McClinton, Brittany
LBL Publications
(2010)
Article
LER control and mitigation: Mask roughness induced LER aberrations sensiitivity study and alter illumination scheme
McClinton, Brittany
;
Naulleau, Patrick
LBL Publications
(2010)
Article
Absorber height effects on SWA restrictions and 'Shadow' LER
McClinton, Brittany M.
Lawrence Berkeley National Laboratory
(2011)
Article
Mask roughness induced LER control and mitigation: aberrations sensitivity study and alternate illumination scheme
McClinton, Brittany M.
Lawrence Berkeley National Laboratory
(2011)
Article
Mask roughness induced LER: a rule of thumb
McClinton, Brittany
;
Naulleau, Patrick
LBL Publications
(2010)
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