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Your search: "author:Mirkarimi, P.B."

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Article

A practical approach for modeling EUVL mask defects

Gullikson, E.M.;
Cerjan, C.;
Stearns, D.J.;
Mirkarimi, P.B.;
Sweeney, D.W.

LBL Publications (2001)

Cover page: A practical approach for modeling EUVL mask defects

Article

Fabrication and performance of nanoscale ultra-smooth programmed defects for EUV Lithography

Olynick, D.L.;
Salmassi, F.;
Liddle, J.A.;
Mirkarimi, P.B.;
Spiller, E.;
Baker, S.L.;
Robinson, J.

LBL Publications (2008)

Cover page: Fabrication and performance of nanoscale ultra-smooth programmed defects for EUV
Lithography

Article

Smoothing EUVL mask substrate defects with an emphasis on real-world pits

Mirkarimi, P.B.;
Spiller, E.;
Baker, S.L.;
Robinson, J.C.;
Salmassi, F.;
Park, S.-J.;
Liang, T.;
Stivers, A.R.;
Ultanir, E.

LBL Publications (2006)

Cover page: Smoothing EUVL mask substrate defects with an emphasis on real-world pits

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