Actinic imaging and evaluation of phase structures on EUV lithography masks

Pupil shaping and coherence control in an EUV mask-imaging microscope

Arial images phase measurement with the AIT: a new dimension in mask metrology

Using aberration test patterns to optimize the performance of EUV aerial imaging microscopes

Quantitative evaluation of mask phase defects from through-focus EUV aerial images

Gradient descent algorithm applied to wavefront retrieval from through-focus images by an extreme ultraviolet microscope with partially coherent source

Wavelength-specific reflections: a decade of EUV mask inspection research

Progress in actinic mask imaging: the closest look at lines, defects in phase roughness

Zoneplate lenses for EUV microscopy

Extendibility using EUV actinic inspection tool for sub-32-nm node