Suspended carbon nanofiber can be used as basis in many attractive inexpensive MEMS devices. Among various methods to fabricate suspended carbon nanofiber, using Nearfield Electro-Mechanical Spinning (NFEMS) to generate carbon nanofiber across a substrate with a trench provides several advantages over other methods. because it can be executed easily and cheaply. In order to get a better performance of those suspend carbon nanofibers, the controllability of both electrospinning and mechanical stretching in NFEMS should be improved. Thus, how to provide a more stable NFEMS method will be discussed in this paper. Generally, for developing a more stable method, during the initiation phase in NFEMS using a side electrostatics initiation method in nearfield electrospinning is more repeatable than using a traditional physical contact initiation method, generating a thinner fiber than using traditional method. During the mechanical stretching phase, both the moving speed and acceleration of the substrate will affect the stability of NFEMS method.