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Scholarly Works (4 results)
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Article
Contamination removal using the Evactron(R) De-contaminator
Morgan, Christopher G.
;
Vane, Ronald
;
Rekawa, Senajith B.
;
Denham, Paul E.
;
Hoef, Brian H.
;
Jones, Michael S.
;
Naulleau, Patrick
LBL Publications
(2010)
Article
Preparations for EUV interferometry of the 0.3 NA MET optic
Goldberg, Kenneth A.
;
Naulleau, Patrick P.
;
Denham, Paul E.
;
Rekawa, Senajith B.
;
Jackson, Keith H.
;
Liddle, J. Alexander
;
Harteneck, Bruce
;
Gullikson, Eric
;
Anderson, Erik H.
LBL Publications
(2003)
Article
Performance of actinic EUVL mask imaging using a zoneplate microscope
Goldberg, Kenneth A.
;
Naulleau, Patrick P.
;
Barty, Anton
;
Rekawa, Senajith B.
;
Kemp, Charles D.
;
Gunion, Robert F.
;
Salmassi, Farhad
;
Gullikson, Eric M.
;
Anderson, Erik H.
;
Han, Hak-Seung
Lawrence Berkeley National Laboratory
(2007)
Article
Ultra-high accuracy optical testing: creating diffraction-limited short-wavelength optical systems
Goldberg, Kenneth A.
;
Naulleau, Patrick P.
;
Rekawa, Senajith B.
;
Denham, Paul E.
;
Liddle, J. Alexander
;
Gullikson, Eric M.
;
Jackson, Keith H.
;
Anderson, Erik H.
;
Taylor, John S.
;
Sommargren, Gary E.
;
Chapman, Henry N.
;
Phillion, Donald W.
;
Johnson, Michael
;
Barty, Anton
;
Soufli, Regina
;
Spiller, Eberhard A.
;
Walton, Christopher C.
;
Bajt, Sasa
Lawrence Berkeley National Laboratory
(2005)
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