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Scholarly Works (3 results)
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Article
Multicusp Sources for Ion Beam Lithography Applications
Leung, K.N.
;
Herz, P.
;
Kunkel, W.B.
;
Perkins, L.
;
Pickard, D.
;
Sarstedt, M.
;
Weber, M.
;
Williams, M.D.
LBL Publications
(1995)
Article
Energy Spread of Ion Beams Generated in Multicusp Ion Sources
Sarstedt, M.
;
Kunkel, W.B.
;
Lee, Y.
;
Leung, K.N.
;
Perkins, L.
;
Weber, W.
;
Williams, M.D.
LBL Publications
(1995)
Article
Beam Emittance Measurements on Multicusp Ion Sources
Sarstedt, M.
;
Lee, Y.
;
Leung, K.N.
;
Perkins, L.
;
Weber, M.J.
;
Williams, M.D.
LBL Publications
(1995)
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