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Your search: "author:Stivers, A.R."

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Scholarly Works (2 results)

Article

Modeling the defect inspection sensitivity of a confocal microscope

Gullikson, E.M.;
Tejnil, E.;
Tsai, K.-Y.;
Stivers, A.R.;
Kusunose, H.

Lawrence Berkeley National Laboratory (2005)

Cover page: Modeling the defect inspection sensitivity of a confocal microscope

Article

Smoothing EUVL mask substrate defects with an emphasis on real-world pits

Mirkarimi, P.B.;
Spiller, E.;
Baker, S.L.;
Robinson, J.C.;
Salmassi, F.;
Park, S.-J.;
Liang, T.;
Stivers, A.R.;
Ultanir, E.

LBL Publications (2006)

Cover page: Smoothing EUVL mask substrate defects with an emphasis on real-world pits

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