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Your search: "author:Wuest, Andrea"

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Scholarly Works (2 results)

Article

Analysis of Optics and Mask Contamination in SEMATECH EUV Micro-Exposure Tools

Wuest, Andrea

LBL Publications (2008)

Cover page: Analysis of Optics and Mask Contamination in SEMATECH EUV Micro-Exposure Tools

Article

Cross-sectional film characterization of exposure-induced carbon contamination on patterned EUV masks

Fan, Yu-Jen;
Yankulin, Leonid;
Antohe, Alin;
Thomas, Petros;
Garg, Rashi;
Mbanaso, Chimaobi;
Khopkar, Yashdeep;
Murray, Thomas;
Wuest, Andrea;
Goodwin, Frank;
Naulleau, Patrick;
Goldberg, Kenneth A.;
Mochi, Iacopo;
Gullikson, Eric;
Anderson, Erik;
Salmassi, Farhad;
Denbeaux, Gregory

LBL Publications (2010)

Cover page: Cross-sectional film characterization of exposure-induced carbon contamination on patterned EUV masks

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