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Electron mobility in graded AlGaN alloys

  • Author(s): Rajan, Siddharth
  • DenBaars, Steve
  • Mishra, Umesh
  • Xing, Huili
  • Jena, Debdeep
  • et al.
Abstract

Polarization gradients in graded AlGaN alloys induce bulk electron distributions without the use of impurity doping. Since the alloy composition is not constant in these structures, the electron scattering rates vary across the structure. Capacitance and conductivity measurements on field effect transistors were used to find mobility as a function of depth. The effective electron mobility at different depths calculated from theory closely matched the measured mobility. Local bulk mobility values for different AlGaN compositions were found, and the electron mobility in AlGaN as a function of alloy composition was deduced. These were found to match with theoretical calculations.

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