Beam power scale-up in MEMS based multi-beam ion accelerators
Skip to main content
eScholarship
Open Access Publications from the University of California

Beam power scale-up in MEMS based multi-beam ion accelerators

  • Author(s): Ji, Q;
  • Afridi, KK;
  • Bauer, T;
  • Giesbrecht, G;
  • Hou, Y;
  • Lal, A;
  • Ni, D;
  • Persaud, A;
  • Qin, Z;
  • Seidl, P;
  • Sinha, S;
  • Schenkel, T
  • et al.
Abstract

We report on the development of multi-beam RF linear ion accelerators that are formed from stacks of low cost wafers and describe the status of beam power scale-up using an array of 120 beams. The total argon ion current extracted from the 120-beamlet extraction column was 0.5 mA. The measured energy gain in each RF gap reached as high as 7.25 keV. We present a path of using this technology to achieve ion currents >1 mA and ion energies >100 keV for applications in materials processing.

Main Content
For improved accessibility of PDF content, download the file to your device.
Current View