Simultaneous phosphorus and Si self-diffusion in extrinsic, isotopically controlled silicon heterostructures
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Simultaneous phosphorus and Si self-diffusion in extrinsic, isotopically controlled silicon heterostructures

  • Author(s): Silvestri, Hughes H.
  • Bracht, Hartmut A.
  • Sharp, Ian D.
  • Hansen, John
  • Nylandsted-Larsen, Arne
  • Haller, Eugene E.
  • et al.
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