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Graphical Mapping of AE for Pad Condition Monitoring in Copper CMP

  • Author(s): Lee, D. E.
  • Choi, Jihong
  • Dornfeld, David
  • Kim, H. J.
  • et al.
Abstract

Chemical mechanical planarization (CMP) of Cu interconnects is a critical bottleneck technology for semiconductor manufacturing at the 65 nm technology node and beyond. The pad condition in CMP is of utmost importance in maintaining acceptable production quality and throughput, as it directly affects many different parameters in CMP including material removal rate (MRR) and process uniformity. Acoustic emission (AE) is a proven technique for in-situ monitoring of a wide range of manufacturing processes, and has been demonstrated for the in-situ monitoring of various phenomena in the CMP process such as endpoint and MRR detection. A novel graphical mapping approach of sensor signal for monitoring pad condition during Cu CMP is proposed and tested, with AE demonstrating improved sensitivity over that of friction force.

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