Three-dimensional non-destructive optical evaluation of laser-processing performance using optical coherence tomography
Abstract
We demonstrate the use of optical coherence tomography (OCT) as a non-destructive diagnostic tool for evaluating laser-processing performance by imaging the features of a pit and a rim. A pit formed on a material at different laser-processing conditions is imaged using both a conventional scanning electron microscope (SEM) and OCT. Then using corresponding images, the geometrical characteristics of the pit are analyzed and compared. From the results, we could verify the feasibility and the potential of the application of OCT to the monitoring of the laser-processing performance.
Many UC-authored scholarly publications are freely available on this site because of the UC's open access policies. Let us know how this access is important for you.