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Open Access Publications from the University of California

A Method of Image-Based Aberration Metrology for EUVL Tools:

  • Author(s): Levinson, Zac;
  • Raghunathan, Sudhar;
  • Verduijn, Erik;
  • Wood, Obert;
  • Mangat, Pawutter;
  • Goldberg, Kenneth;
  • Benk, Markus;
  • Wojdyla, Antoine;
  • Philipsen, Vicky;
  • Hendrickx, Eric;
  • Smith, Bruce W.
  • et al.
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