Skip to main content
eScholarship
Open Access Publications from the University of California

Nonlinear optical diagnosis of oxide traps formed during reactive ion etching

  • Author(s): Fang, J
  • Heidbrink, WW
  • Li, GP
  • et al.

Published Web Location

https://doi.org/10.1063/1.1288168Creative Commons Attribution 4.0 International Public License
Main Content
Current View