Skip to main content
eScholarship
Open Access Publications from the University of California

Experimental evaluation and comparative analysis of commercial variable-capacitance MEMS accelerometers

  • Author(s): Acar, Cenk
  • Shkel, A M
  • et al.
Abstract

This paper reports the experimental analysis of commercially available variable-capacitance MEMS accelerometers, characterized under standardized tests. Capacitive MEMS sensors of the same low-level input acceleration range with various mechanical sensing element designs, materials, fabrication technologies and price ranges were selected for evaluation. The selected sensors were characterized using ANSI and NIST certified testing equipment and under the same testing conditions; and their sensitivity, resolution, linearity, frequency response, transverse sensitivity, temperature response, noise level and long-term stability were tested and compared. The experimental results are then interpreted to provide an insight to advantages and disadvantages for using a particular mechanical design, fabrication technology, sensor material and the techniques for electronics integration and packaging of each specific sensor design.

Many UC-authored scholarly publications are freely available on this site because of the UC Academic Senate's Open Access Policy. Let us know how this access is important for you.

Main Content
Current View