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Effective optical properties of supported silicon nanopillars at telecommunication wavelengths

Abstract

We measure and calculate the optical response of a structure consisting of a square array of subwavelength silicon posts on a silicon substrate at telecommunication wavelengths. By the use of the reduced Rayleigh equations and the Fourier modal method (rigorous coupled wave analysis) we calculate the reflectivity of this structure illuminated from vacuum by normally incident light. The calculated reflectivities together with experimentally determined ones, are used to test the accuracy of effective medium theories of the optical properties of structured silicon surfaces, and to estimate the effective refractive index of such surfaces produced by a homogeneous layer model.

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