Skip to main content
eScholarship
Open Access Publications from the University of California

Electrostatic and mechanical characterization of 3-D micro-wineglass resonators

  • Author(s): Senkal, D
  • Ahamed, MJ
  • Trusov, AA
  • Shkel, AM
  • et al.
Abstract

In this paper, we present methods for characterization of 3-D micro-wineglass resonators. Two interchangeable modes of excitation are demonstrated: (1) Mechanical pinging using a piezo actuated probe assembly and (2) electrostatic excitation using assembled electrode structures. Two interchangeable modes of detection are also presented: optical pick-up using laser Doppler vibrometry and capacitive detection. 3-D micro-glassblown wineglass resonators were used to demonstrate the characterization methods in this paper. Electrostatic excitation was used to obtain the frequency response of micro-glassblown resonators showing a Q-factor of 40.000 at 14.8 kHz, whereas piezo-pinging was used to obtain the time domain response of the resonators. © 2014 Elsevier B.V. All rights reserved.

Many UC-authored scholarly publications are freely available on this site because of the UC Academic Senate's Open Access Policy. Let us know how this access is important for you.

Main Content
Current View