Lawrence Berkeley National Laboratory

High-resolution electron-beam tomography is a promising technique to produce the three-dimensional structure of nano-particles (and other suitable specimens) at atomic resolution. It is possible to combine ultra-high (sub-Angstrom) resolution zone-axis images with off-zone images to produce the specimen structure at atomic resolution. An improved path to atomic-resolution tomography combines "zone-axis tomography" with high-resolution dark-field hollow-cone imaging. Image data obtained in this mode will provide the initial reconstruction, with zone-axis images used for refinement.