Three-dimensional surface phase imaging based on integrated thermo-optic swept laser
- Author(s): Kim, HJ
- Cho, J
- Noh, YO
- Oh, MC
- Chen, Z
- Kim, CS
- et al.
Published Web Locationhttps://doi.org/10.1088/0957-0233/25/3/035201
We developed an optical frequency domain imaging (OFDI) system based on an integrated thermo-optic swept laser to achieve three-dimensional surface imaging. The wavelength was swept by applying a heating signal to a thermo-optic polymeric waveguide. The sub-micrometer surface profile was converted from the three-dimensional phase information of the OFDI system on various samples used as resolution targets with a step height of 120 nm. © 2014 IOP Publishing Ltd.
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