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Three-dimensional surface phase imaging based on integrated thermo-optic swept laser

  • Author(s): Kim, HJ
  • Cho, J
  • Noh, YO
  • Oh, MC
  • Chen, Z
  • Kim, CS
  • et al.
Abstract

We developed an optical frequency domain imaging (OFDI) system based on an integrated thermo-optic swept laser to achieve three-dimensional surface imaging. The wavelength was swept by applying a heating signal to a thermo-optic polymeric waveguide. The sub-micrometer surface profile was converted from the three-dimensional phase information of the OFDI system on various samples used as resolution targets with a step height of 120 nm. © 2014 IOP Publishing Ltd.

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