Skip to main content
Open Access Publications from the University of California

Three-dimensional surface phase imaging based on integrated thermo-optic swept laser

  • Author(s): Kim, HJ
  • Cho, J
  • Noh, YO
  • Oh, MC
  • Chen, Z
  • Kim, CS
  • et al.

We developed an optical frequency domain imaging (OFDI) system based on an integrated thermo-optic swept laser to achieve three-dimensional surface imaging. The wavelength was swept by applying a heating signal to a thermo-optic polymeric waveguide. The sub-micrometer surface profile was converted from the three-dimensional phase information of the OFDI system on various samples used as resolution targets with a step height of 120 nm. © 2014 IOP Publishing Ltd.

Many UC-authored scholarly publications are freely available on this site because of the UC's open access policies. Let us know how this access is important for you.

Main Content
Current View