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Three-dimensional surface phase imaging based on integrated thermo-optic swept laser

  • Author(s): Kim, HJ;
  • Cho, J;
  • Noh, YO;
  • Oh, MC;
  • Chen, Z;
  • Kim, CS
  • et al.

Published Web Location

https://doi.org/10.1088/0957-0233/25/3/035201Creative Commons 'BY' version 4.0 license
Abstract

We developed an optical frequency domain imaging (OFDI) system based on an integrated thermo-optic swept laser to achieve three-dimensional surface imaging. The wavelength was swept by applying a heating signal to a thermo-optic polymeric waveguide. The sub-micrometer surface profile was converted from the three-dimensional phase information of the OFDI system on various samples used as resolution targets with a step height of 120 nm. © 2014 IOP Publishing Ltd.

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