The optimum Cs condition for high-resolution transmission electron microscopy
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The optimum Cs condition for high-resolution transmission electron microscopy

  • Author(s): O'Keefe, Michael A.
  • et al.
Abstract

With the advent of electron-optical systems able to generate negative spherical aberration (usually called "Cs correctors"), it has now become feasible to zero-out objective lens Cs in the high-resolution transmission electron microscope. However, I show that - instead of tuning out spherical aberration completely - there is an optimum value for the residual Cs that maximizes information transfer to the best possible resolution and depends only on the information limit of the microscope.

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