Lawrence Berkeley National Laboratory

The one-Angstrom microscope (OAM) project at the USDOE's National Center for Electron Microscopy has extended the limits of high-resolution transmission electron microscopy to sub-Angstrom levels. The OAM combines image-processing software with a modified 300keV electron microscope equipped with a highly-coherent field-emission electron gun. We have found that a reduction in the OAM's electron-gun extraction voltage allows us to "see" silicon atoms separated by only 0.78A.