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Simulation and fabrication of 0-3 composite PZT films for ultrahigh frequency (100-300 MHz) ultrasonic transducers

  • Author(s): Chen, X
  • Fei, C
  • Chen, Z
  • Chen, R
  • Yu, P
  • Chen, Z
  • Kirk Shung, K
  • Zhou, Q
  • et al.

Published Web Location

https://doi.org/10.1063/1.4942857Creative Commons Attribution 4.0 International Public License
Abstract

© 2016 AIP Publishing LLC. This paper presents simulation, fabrication, and characterization of single-element ultrahigh frequency (100-300-MHz) needle ultrasonic transducers based on 0-3 composite Pb(Zr0.52Ti0.48)O3(PZT) films prepared by using composite ceramic sol-gel film and sol-infiltration technique. The center frequency of the developed transducer at 300-MHz was the highest frequency of PbTiO3ceramic-based ultrasonic transducers ever reported. Furthermore, a brief description of the composite model was followed by the development of a new expression for predicting the longitudinal velocity, the clamped dielectric constant, and the complex electromechanical coupling coefficient ktof these films, which is very important in ultrasonic transducer design. Moreover, these parameters are difficult to obtain by measuring the frequency dependence of impedance and phase angle because of the weak signal of the previous 0-3 composite films transducer (>100 MHz). The modeling results show that the Cubes model with a geometric factor n = 0.05 fits well with the measured data. This model will be helpful for developing the 0-3 composite systems for ultrahigh frequency ultrasonic transducer design.

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