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Open Access Publications from the University of California

Ultra-high quality factor planar Si3N4 ring resonators on Si substrates

  • Author(s): Tien, Ming-Chun
  • Bauters, Jared
  • Heck, Martijn
  • Spencer, Daryl T
  • Blumenthal, Daniel
  • Bowers, J E
  • et al.
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