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Thin Film Synthesis Using Miniature Pulsed Metal Vapor Vacuum Arc Plasma Guns

  • Author(s): Godechot, X.
  • Salmeron, E.M.
  • Ogletree, D.F.
  • Galvin, J.E.
  • MacGill, R.A.
  • Dickinson, M.R.
  • Yu, Kin Man
  • Brown, I.G.
  • et al.
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