UC Irvine

This paper presents a method of dynamically balancing tuning fork microresonators, enabling maximization of quality factor Q-factor) in structures with imperfections. Nonsymmetric tuning of stiffness in a coupled 2-DOF resonator is completed through the use of the negative electrostatic spring effect. This variable stiffness is shown to be able to adjust the reaction forces of the structure at the anchors, effectively balancing any spring imperfections caused by fabrication imperfections. Balancing the structure through stiffness matching minimizes the loss of energy through the substrate and maximizes Q-factor of the device's antiphase mode. The approach is experimentally demonstrated using a vacuum packaged microelectromechanical tuning fork resonator with operational frequency of 2.2 kHz and antiphase Q-factor of 0.6 million. By electrostatically tuning the reaction force at the anchors caused by fabrication imperfections, anchor loss can be suppressed, increasing the Q-factor to above 0.8 million. The experimentally validated analytical model of substrate dissipation is confirmed to be applicable to Q-factor tuning in antiphase driven resonators and gyroscopes. © 2001-2012 IEEE.