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Characterization of Line Edge Roughness (LER) Propagation from Resist: Underlayer Interfaces in Ultra-thin Resist Films

  • Author(s): George, Simi
  • Naulleau, Patrick
  • Wu, Se Yu
  • Kennedy, Joseph
  • Xie, Song Yuan
  • Flanigan, Kyle
  • Wallow, Thomas
  • et al.
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