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Construction and characterization of a frequency-controlled, picometer-resolution, displacement encoder-actuator.

  • Author(s): Koulakis, John P
  • Stein, Michael
  • Holczer, Károly
  • et al.

Published Web Location

https://doi.org/10.1063/1.4950778
Abstract

We have constructed an actuator/encoder whose generated displacement is controlled through the resonance frequency of a microwave cavity. A compact, 10-μm-range, digitally controlled actuator executing frequency-coded displacement with picometer resolution is described. We consider this approach particularly suitable for metrologic-precision scanning probe microscopy.

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