Construction and characterization of a frequency-controlled, picometer-resolution, displacement encoder-actuator.
- Author(s): Koulakis, John P
- Stein, Michael
- Holczer, Károly
- et al.
Published Web Locationhttps://doi.org/10.1063/1.4950778
We have constructed an actuator/encoder whose generated displacement is controlled through the resonance frequency of a microwave cavity. A compact, 10-μm-range, digitally controlled actuator executing frequency-coded displacement with picometer resolution is described. We consider this approach particularly suitable for metrologic-precision scanning probe microscopy.