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Construction and characterization of a frequency-controlled, picometer-resolution, displacement encoder-actuator
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https://doi.org/10.1063/1.4950778Abstract
We have constructed an actuator/encoder whose generated displacement is controlled through the resonance frequency of a microwave cavity. A compact, 10-μm-range, digitally controlled actuator executing frequency-coded displacement with picometer resolution is described. We consider this approach particularly suitable for metrologic-precision scanning probe microscopy.
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