Estimation of the electron beam energy spread for TEM information limit
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Estimation of the electron beam energy spread for TEM information limit

  • Author(s): O'Keefe, Michael A.
  • Tiemeijer, Peter C.
  • Sidorov, Maxim V.
  • et al.
Abstract

Sub-Angstrom TEM of materials requires focal-series reconstruction (FSR) or electron holography to retrieve the electron wave at the specimen exit-surface to very high resolution. As a consequence, we need to measure the microscope information limit. With a sub-Angstrom information limit, the one-Angstrom microscope (OAM) project at the NCEM has achieved sub-Angstrom resolution by FSR. We present a new method of estimating the information limit of the microscope, based on energy-spread measurements with an image filter.

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