Lawrence Berkeley National Laboratory

Sub-Angstrom TEM of materials requires focal-series reconstruction (FSR) or electron holography to retrieve the electron wave at the specimen exit-surface to very high resolution. As a consequence, we need to measure the microscope information limit. With a sub-Angstrom information limit, the one-Angstrom microscope (OAM) project at the NCEM has achieved sub-Angstrom resolution by FSR. We present a new method of estimating the information limit of the microscope, based on energy-spread measurements with an image filter.