Lawrence Berkeley National Laboratory
Chip-Scale Nanofabrication of Single Spins and Spin Arrays in Diamond
- Author(s): Toyli, David M.
- et al.
Published Web Locationhttps://doi.org/DOI: 10.1021/nl102066q
We demonstrate a technique to nanofabricate nitrogen vacancy (NV) centers in diamond based on broad-beam nitrogen implantation through apertures in electron beam lithography resist. This method enables high-throughput nanofabrication of single NV centers on sub-100-nm length scales. Secondary ion mass spectroscopy measurements facilitate depth profiling of the implanted nitrogen to provide three-dimensional characterization of the NV center spatial distribution. Measurements of NV center coherence with on-chip coplanar waveguides suggest a pathway for incorporating this scalable nanofabrication technique in future quantum applications.