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Device for dispersal of micrometer- and submicrometer-sized particles in vacuum
Abstract
A simple, versatile device for dispersing micrometer- and submicrometer-sized particles in vacuum is described. The source allows control of particle size (0.5 μm≤l≤200 μm) and particle flux density up to roughly 107 cm-2 s-1. Several types of microparticles were successfully dispersed.
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