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Calibration of Modulation Transfer Function of Surface Profilometers with 1D and 2D Binary Pseudo-random Array Standards

  • Author(s): Yashchuk, Valeriy V.
  • et al.
Abstract

We suggest and describe the use of a binary pseudo-random grating as a standard test surface for calibration of the modulation transfer function of microscopes. Results from calibration of a MicromapTM-570 interferometric microscope are presented.

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