Compensation of drifts in high-Q MEMS gyroscopes using temperature self-sensing
- Author(s): Prikhodko, IP
- Trusov, AA
- Shkel, AM
- et al.
Published Web Locationhttps://doi.org/10.1016/j.sna.2012.12.024
We present a long-term bias drift compensation algorithm for high quality factor (Q-factor) MEMS rate gyroscopes using real-time temperature self-sensing. This approach takes advantage of linear temperature dependence of the drive-mode resonant frequency for self-compensation of temperature-induced output drifts. The approach was validated using a vacuum packaged silicon Quadruple Mass Gyroscope (QMG), with signal-to-noise ratio (SNR) enhanced by isotopic Q-factors of 1.2 million. Owing to the high Q-factors, measured frequency resolution of 0.01 ppm provided a temperature self-sensing precision of 0.0004°C, on par with the state-of-the-art MEMS resonant thermometers. The real-time self-compensation yielded a total bias error of 2°/h and a scale-factor error of 700 ppm over temperature range of 25-55°C. The presented approach enabled repeatable long-term rate measurements required for MEMS gyrocompassing applications with a milliradian azimuth precision. © 2012 Elsevier B.V. All rights reserved.
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