Skip to main content
Open Access Publications from the University of California

A Plasma Lens for Magnetron Sputtering

  • Author(s): Anders, Andre
  • et al.

A plasma lens, consisting of a solenoid and potential-defining ring electrodes, has been placed between a magnetron and substrates to be coated. Photography reveals qualitative information on excitation, ionization, and the transport of plasma to the substrate.

Main Content
Current View