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Open Access Publications from the University of California

A Plasma Lens for Magnetron Sputtering

  • Author(s): Anders, Andre;
  • et al.
Abstract

A plasma lens, consisting of a solenoid and potential-defining ring electrodes, has been placed between a magnetron and substrates to be coated. Photography reveals qualitative information on excitation, ionization, and the transport of plasma to the substrate.

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